The best Side of CLBO Crystal
The best Side of CLBO Crystal
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With this paper, the new lapping slurry and sprucing slurry are introduced. Plus the deliquescence diploma of CLBO is fallen to cheapest. A different working engineering is additionally adopted. Just after tough sprucing, the concentration of extremely-precision sprucing slurry is greater properly. So does the ultra-precision polishing velocity, and the wiping pace is faster in comparison to the deliquescence velocity. The CLBO crystal area roughness can achieve 1nm and keep the area top quality nicely. Obtain by your institution
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We summarized The present development standing from the superior-electricity DUV laser each for the wavelength of FHG on the 1-μm laser and at 193 nm. The new improvement with the solid-state/fiber laser, plus the nonlinear optical crystals, prompts not just the normal energy but will also the beam high quality (coherence) with the DUV lasers to an unprecedented degree.
By way of example, The present concave OC could be replaced by a aircraft mirror which could mitigate the power density on the area of M1 plus the diamond. Furthermore, using significant hurt threshold coatings for M1 and diamond would also Enhance the output power without any damages. Then, the NIR laser at the 2nd Stokes wavelength can be higher ample, together with its excellent beam high-quality, to make the ultimate DUV laser at 193 nm having a large common electrical power.
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A result of the thermal lens result within the strong-point out lasers, In case the heating management is inadequate, It's not at all uncomplicated to acquire the reliable-state laser by using a higher electricity along with a significant beam high quality simultaneously. Not long ago, with the event of the thin disk laser and single-crystal fiber (SCF) laser, a significant-power laser at the basic wavelength (1 μm) had been recognized with a good beam top quality Despite having a TEM00 mode beam [4,24], which would be excellent candidates for the elemental of the DUV laser technology. Another prospect for the basic may be the significant-electric power fiber laser which can be obtained by coherent beam mix with M2 price below 1.
On the other facet, the ability scaling in the NIR laser is an additional part to improve the regular electrical power of the 193-nm DUV laser. Mainly because of the deficiency of the higher-ability amplification Resolution of the NIR laser (one example is at 1553 click here nm), nonlinear frequency procedures such as optical parameter oscillation (OPO) may very well be placed on develop a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also getting relative greater electric power [21]. Recently, a diamond Raman laser showed its potential in acquiring a high electrical power in addition to a high conversion efficiency for the 1st Stokes from the one-μm laser [22,23], which means the possibility to generally be used while in the 193-nm DUV laser technology thanks to its significant Raman obtain and enormous frequency change.
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The beam profile revealed in Determine 7b shown a good beam top quality as among the list of deserves of Raman laser, which might be effective to generate a 193-nm DUV laser with a high quality beam.
The conversion effectiveness from fundamental NIR to DUV is from five% to 36% according to the claimed leads to Desk 1. Raising the conversion efficiency will decrease the stress on the design and set up of the elemental laser amplifier plus the electric powered power usage. A very good beam top quality of the basic laser will likely contribute for the raising of the conversion efficiency along with the suitable electricity depth with the NIR and environmentally friendly laser while in the SHG and FHG system, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all over fifty%, respectively [12], which corresponds towards the conversion efficiency of 35% from essential to DUV.
The event of the 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser ability properly, a new principle of your 193-nm DUV laser generation is offered dependant on the diamond Raman laser.